| 000 | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 005 | 20251203091037.0 | ||
| 020 | _a0444424199 | ||
| 082 |
_a621.044 _bMOR |
||
| 100 | _aMorgan, Russ A. | ||
| 245 | _aPlasma etching in semiconductor fabrication | ||
| 260 |
_aOxford _bElsevier _c1985 |
||
| 300 |
_ax,316p. _b22cm. _cHB. |
||
| 490 | _aPlasma technology | ||
| 630 | _aPlasma engineering | ||
| 964 |
_bEng _c100 _d _e010 _f _g_ |
||
| 997 | _a34695 LIBSC C | ||
| 999 |
_c27898 _d27898 |
||