00318nam a2200121 a 450000500170000002000150001708200150003210000200004724500260006726000400009330000190013349000440015220251203110641.0  a0849324386  a533.5bCHA  aChambers,Austin  aModern Vacuum Physics  aNew YorkbChampman & Hall/CRCc2005  a341p.c24cm HB  aMasters Series in Physics and Astronomy