TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - Mems microsystems design and manufacture: _
SN  - 9786676487093
U1  - 621.381 
PY  - 2012///
CY  - New Delhi
PB  - TataMcGraw Hill
KW  - 
KW  - Microelectronics
KW  - microfinancial system
KW  - microelectronic pakaging
ER  -