Hsu, Tai-Ran  _ <br/><br/>
Mems microsystems design and manufacture  _ 

 - New Delhi  TataMcGraw Hill  2012 
 - xii,436p.  PB  22cm. 
<br/><br/><label>ISBN: </label>9786676487093 
<br/><br/><label>Subjects--Personal Names: </label>   _ 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Microelectronics<br/>microfinancial system<br/>microelectronic pakaging
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU