00417nam a2200133 a 450000500170000002000180001708200190003510000180005424501250007225000120019726000300020930000250023950000190026420251203112242.0  a9781420055191  a621.38152bMAD  aMadou, Marc J  aFundamentals of microfabrication and nanotechnology:Vol-IIbmanufacturing techniques for microfabrication and nanotechno  a3rd ed.  aNew YorkbCRC Pressc2012  axiv,656p.c26cm.bHB  aincludes index