Senturia,Stephen D <br/><br/>
Microsystem design 

 - New Delhi  Springer  2001-R2010 
 - xxvi,689p.  PB  22cm. 
<br/><br/> includes index 
<br/><br/><label>ISBN: </label>9788181285461 
<br/><br/><label>Dewey Class. No.: </label>621.381  / SEN