Plasma etching in semiconductor fabrication (Record no. 27898)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00000nam a2200000 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251203091037.0 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0444424199 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.044 |
| Item number | MOR |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Morgan, Russ A. |
| 245 ## - TITLE STATEMENT | |
| Title | Plasma etching in semiconductor fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Oxford |
| Name of publisher, distributor, etc. | Elsevier |
| Date of publication, distribution, etc. | 1985 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | x,316p. |
| Other physical details | 22cm. |
| Dimensions | HB. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Plasma technology |
| 630 ## - SUBJECT ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Plasma engineering |
| 964 ## - | |
| -- | Eng |
| -- | 100 |
| -- | |
| -- | 010 |
| -- | |
| -- | _ |
| 997 ## - | |
| -- | 34695 LIBSC C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total checkouts | Full call number | Barcode | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Central Library | Central Library | 08/04/1998 | 195.00 | 621.044 MOR | 34695 | Books |